Smaller footprint, saving more space.
No Noise.
Fast temperature response.
Lower energy consumption. (Energy saving is approx. 80% compared to compressor base chiller).
Environmentally friendly. (No Freon).
High reliability. MTBF > 5 years.
A Thermoelectric Temperature Control System w/full control touch screen for the Etch, CVD and PVD process of semiconductor wafer factory helping with the accurate temperature control of the process chamber of Etch or CVD or PVD systems.
Process Circulating Liquid: Fluorinert (FC-3283 3M)
Pump: 0.08 kw Magnetically Coupled Pump
Coolant Flow: 4 GPM @ 30psi
Tank: 3.0L
Interface Type: RS485C, 232C, Analog DIO, LonWorks, DeviceNet
Rate Current: 30A
Rated Voltage: 3-phase AC208V±10% 50/60Hz 15A
Dimensions:
Chiller: H492mm x D460mm x W230mm
2RU Controller: H125mm x D564mm x W433mm
Weight:
Chiller 30KG
Controller: 20KG
A Thermoelectric Temperature Control System w/full control touch screen for the Etch, CVD and PVD process of semiconductor wafer factory helping with the accurate temperature control of the process chamber of Etch or CVD or PVD systems.
Process Circulating Liquid: Fluorinert (FC-3283 3M)
Pump: 0.08 kw Magnetically Coupled Pump
Coolant Flow: 4 GPM @ 30psi
Tank: 3.0L
Interface Type: RS485C, 232C, Analog DIO, LonWorks, DeviceNet
Rate Current: 30A
Rated Voltage: 3-phase AC208V±10% 50/60Hz 15A
Dimensions:
Chiller: H492mm x D460mm x W230mm
2RU Controller: H125mm x D564mm x W433mm
Weight:
Chiller 30KG
Controller: 20KG
Smaller footprint, saving more space.
No Noise.
Fast temperature response.
Lower energy consumption. (Energy saving is approx. 80% compared to compressor base chiller).
Environmentally friendly. (No Freon).
High reliability. MTBF > 5 years.