Chiller Collection.

C-300 Chiller

  • Customizable Products. ISO 9000.

  • No Noise.

  • Fast temperature response.

  • Lower energy consumption.

  • Enviromentally friendly. (No Freon).

  • High reliability. MTBF > 5 Years.

This product is mainly used in the production line of 5G optical module to detect the performance of optical module parameters under extreme temperature changes(0°C-80°C).

ZMO-500/600

MOCVD Bath

  • Level Alarms Provided.

  • Lower energy consumption. (Energy saving is approx. 80% compared to compressor base chiller)

  • Environmentally friendly. (No Freon)

  • High reliability. MTBF > 5 years

A Thermoelectric Temperature Control System w/full control touch screen for the Etch, CVD and PVD process of semiconductor wafer factory helping with the accurate temperature control of the process chamber of Etch or CVD or PVD systems.

Z-3000 Chiller

  • Smaller footprint, saving more space.

  • No noise.

  • Fast temperature response.

  • Lower energy consumption. (Energy saving is approx. 80% compared to compressor base chiller)

  • Environmentally friendly. (No Freon)

  • High reliability. MTBF > 5 years

A Thermoelectric Temperature Control System w/full control touch screen for the Etch, CVD and PVD process of semiconductor wafer factory helping with the accurate temperature control of the process chamber of Etch or CVD or PVD systems.

Z-6000 Chiller

  • Smaller footprint, saving more space.

  • No noise.

  • Fast temperature response.

  • Lower energy consumption. (Energy saving is approx. 80% compared to compressor base chiller)

  • Environmentally friendly. (No Freon)

  • High reliability. MTBF > 5 years

A Thermoelectric Temperature Control System w/full control touch screen for the Etch, CVD and PVD process of semiconductor wafer factory helping with the accurate temperature control of the process chamber of Etch or CVD or PVD systems.

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